Blue M Ships Clean Room Oven to Semiconductor Industry

Posted: Jun 19, 2023

Blue M, a global manufacturer of laboratory and industrial ovens, announced the shipment of a clean room oven to the semiconductor industry for processing silicon wafers.

This oven has a temperature range of 15°C above ambient to 350°C and interior chamber dimensions of 48.8" W x 23.9" D x 35.7" H. The unit is designed with silicone free construction which reduces contamination inside the cleanroom and includes three (3) stainless steel slotted shelves.

The unit utilizes an N2 purge system to supply inert gas to the chamber which minimizes moisture buildup during the heating process. All of the seams and entrance ports of the stainless-steel interior are fully welded to minimize cleanroom contamination or air exchange between the process and ambient air. A water-cooled coil is mounted in the conditioning plenum for a cooling event and can be utilized when operation at or below 100°C is required.

The oven is designed with horizontal airflow to maximize heating rates and an airflow switch to shut off the heating elements if there is a blower system failure. The control system utilizes a Watlow F4T controller with forty (40) ramp and soak profiles, Ethernet connectivity, data logging and graphical trend charting capabilities.

“This Blue M model’s standard design features a single door, but this unit is customized with bi-parting doors per the customer’s request. It is also designed with silicone free construction to minimize contamination within the cleanroom.”

– Jonathan Young, Blue M Product Manager

Unique features of this Blue M inert gas oven include:

  • Silicone free construction
  • Dual leaf bi-parting doors
  • Three (3) stainless steel slotted shelves
  • Watlow F4T programmable controller with Ethernet connectivity and data logging
  • Over temperature protection
  • N2 purge system
  • UL508A certified control panel




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