Blue M Ships One Clean Room Inert Gas Oven to the Semiconductor Industry
Thermal Product Solutions, a global manufacturer of thermal-processing equipment, announced the shipment of a Blue M Clean Room Inert Gas Oven to the semiconductor industry.
The clean room oven has a temperature range of 15°C above ambient to 350°C and interior chamber dimensions of 44" W x 24" D x 36" H. The cabinet style unit offers a minimal footprint with exterior dimensions of 69” W x 40” D x 79” H, saving the customer valuable production floor space.
This Blue M Clean Room Inert Gas Oven is designed with semi-pierce walls and utilizes a variable frequency drive (VFD) on the blower motor to enable tuning of airflow across the oven workspace. A high temperature HEPA filter filters air prior to entering to the workspace. The unit also includes 2 clean room, heavy gauge, stainless steel slotted shelves that offer excellent resistance to high temperature operations in corrosive atmospheres.
“Our customer requested silicone-free construction for this oven so all gaskets for the door, cooling coil pipe, and motor seals were changed from silicone to viton.”
– Jonathan Young, Blue M Product Manager
Unique features of this Blue M Clean Room Inert Gas Oven include:
- Low N2 pressure switch and alarm
- Timer and End-Of-Process alarm
- Door switch to automatically shut off heating elements and blowers when the door is opened
- Airflow switch to shut off heating elements
- ¾ Hp motor with a balanced stainless steel multi-blade blower wheel
- Horizontal airflow system
- Cooling coil system
- Trace oxygen analyzer
- Gas flow meter to regulate gas flow rate
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