Blue M Ships One Clean Room Inert Gas Oven to the Semiconductor Industry

Posted: Nov 09, 2022

Thermal Product Solutions, a global manufacturer of thermal-processing equipment, announced the shipment of a Blue M Clean Room Inert Gas Oven to the semiconductor industry.

The clean room oven has a temperature range of 15°C above ambient to 350°C and interior chamber dimensions of 44" W x 24" D x 36" H. The cabinet style unit offers a minimal footprint with exterior dimensions of 69” W x 40” D x 79” H, saving the customer valuable production floor space. 

This Blue M Clean Room Inert Gas Oven is designed with semi-pierce walls and utilizes a variable frequency drive (VFD) on the blower motor to enable tuning of airflow across the oven workspace. A high temperature HEPA filter filters air prior to entering to the workspace. The unit also includes 2 clean room, heavy gauge, stainless steel slotted shelves that offer excellent resistance to high temperature operations in corrosive atmospheres.

“Our customer requested silicone-free construction for this oven so all gaskets for the door, cooling coil pipe, and motor seals were changed from silicone to viton.”

– Jonathan Young, Blue M Product Manager

Unique features of this Blue M Clean Room Inert Gas Oven include:

  • Low N2 pressure switch and alarm
  • Timer and End-Of-Process alarm
  • Door switch to automatically shut off heating elements and blowers when the door is opened
  • Airflow switch to shut off heating elements
  • ¾ Hp motor with a balanced stainless steel multi-blade blower wheel
  • Horizontal airflow system
  • Cooling coil system
  • Trace oxygen analyzer
  • Gas flow meter to regulate gas flow rate




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